Advantest Corp.
Automated Testing Equipment (ATE) verify the quality, performance and reliability of semiconductors by electrically testing these complex and multifarious functions of semiconductors with high accuracy. The automated testing technologies from Advantest at the top of the industry are contributing to higher efficiency in production on customer sites, technological innovations of the electronics industry, and greater safety, security and comfort for society.
- +81-3-3214-7500
- +81-3-3214-7712
- webmaster@advantest.com
- Shin Marunouchi Center Bldg.
1-6-2, Marunouchi, Chiyoda-ku,
Tokyo, 100-0005
Japan
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Product
Scanning Electron Microscope
E5620
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The E5620 is a MASK DR-SEM(∗) product for reviewing and classifying ultra-small defects in photomasks and mask blanks. It implements Advantest’s highly stable image capture technology to easily import defect location data from mask inspection systems and automatically image the locations. Compared to the E5610, our predecessor DR-SEM system, the E5620 features a number of improvements designed specifically to target mask requirements for extreme ultraviolet (EUV) lithography.
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Product
CD-SEM
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Our CD-SEM tools measure the width, height, sidewall angle, etc. of wiring patterns on semiconductor photomasks and wafers.
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Product
Metrology/SEM
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Our SEM products use scanning electron microscope technology to measure and review tiny surface structures such as photomask etching and circuitry on wafers with high precision and stability.
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Product
Power Device Test Systems
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Power semiconductors are devices that control electric power, and are used in automobiles and a wide range of electrical products. Our power semiconductor test systems, developed and provided by CREA, an Advantest Group company, specialize in testing power semiconductors that handle high voltages and large currents, and have special safety features for this purpose.






