Mask
screens a surface or a signal to a certain shape.
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Product
Mask Alignment Systems
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EVG’s inventions, such as the world’s first bottom-side alignment system in 1985, have pioneered and set the industry standards in both top and double-sided lithography, aligned wafer bonding and nanoimprint lithography. EVG contributes in these areas through continuous development of mask aligner product generations to augment this core lithography technology.
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Product
Tabletop Mask Aligner
Model 200
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The OAI Model 200 Mask Aligner is a cost-effective high performance mask Aligner that has been engineered with industry proven components that have made OAI a leader in the photolithography capital equipment industry. The Model 200 is a tableop mask Aligner that requires minimal cleanroom space. It offers an economic alternative for R&D, or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The system is capable of one micron resolution and alignment precision.
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Product
Automated Mask Aligner with Integrated Mask Changer
Model 6000A-MC
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The Model 6000A-MC is a precision system combining OAI’s Model 6000, Automated Production Mask Aligner, with an integrated mask changer. The mask changer can handle from 10 to 150 masks. Ideal for both semiconductor and bio-tech applications. It also is designed with a bar code reader to assure each mask is coordinated to the right process. Please contact OAI for further product information.
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Product
MASK DR-SEM
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Our defect review SEM tools perform detailed reviews of minute defects on photomasks.
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Product
Reticle/Mask Particle Remover
RP-1
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The RP-1 automatically removes particles from the reticle/mask by air (or N2) and vacuum suction. Routinely removing the particles before the lithography process extends the replacement cycle of the pellicle and cleaning cycle of the mask, thereby contributing to a reduction in running costs.
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Product
Tabletop Front & Backside Mask Aligner
Model 200IR
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The OAI Model 200IR Mask Aligner is a tabletop system that requires minimal clean room space. It is a cost-effective alternative for R&D or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The Model 200IR Mask Aligner is capable of one micron resolution and alignment precision. It has an alignment module which features mask insert sets and quick-change wafer chucks that enable the use of a variety of substrates and masks without requiring tools for reconfiguration. The alignment module incorporates micrometers for X, Y, and z-axis.
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Product
MASK MVM-SEM® E3600 Series
E3630
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Together with the miniaturization of semiconductors, high-accurate and stable measurement and evaluation is needed for circuit patterns such as mask patterns and holes. Advantest's E3600 series are used by a wide variety of companies, from semiconductor manufacturers to photomask makers to device and materials producers.
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Product
NanoLattice Pitch Standard for Mask Handling Tools (NLSM)
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The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM). Make the grade, with the only pitch standard of its kind available below the 130 nm node.
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Product
Mask Flatness Measurement System
Tropel® UltraFlatTM 200 Mask System
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The Tropel® UltraFlatTM 200 Mask System was designed specifically for the photomask industry. It delivers the lowest measurement uncertainty for ever-tightening mask flatness specifications. Shrinking device features require not only flatter wafers, but flatter masks.
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Product
Automated Front & Backside Mask Aligner System
Model 6000
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With over 4 decades of manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with an elite class of production photolithography equipment. Built on the proven OAI modular platform, the Model 6000 has front and backside alignment that is fully automated with a submicron printing capability as well as submicron top to bottom front side alignment accuracy which delivers performance that is unmatched at any price. Choose either topside or optional backside alignment which uses OAI’s customized advanced recognition pattern software. These Mask Aligners have OAI’s Advanced Beam Optics with better than ±3% uniformity and a throughput of 200 wafers per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10mm), thin substrates (down to 100 micron thick), and thick photo resist.
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Product
Medical Mask Gas Exchange Pressure Difference Tester
DRK371-II
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Shandong Drick Instruments Co., Ltd.
It is used to measure the gas exchange pressure difference of medical surgical masks and other products.
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Product
Custom Solutions for Mask Aligners
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OAI offers custom designed solutions built to your unique specification.
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Product
GENERAL INSPECTION MACHINE AFTER SOLDER MASK
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DVI is a technology of automated optical inspection, which can inspect deep to the difference from semi-transparent layers or semi-reflective layers.
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Product
Front & Backside, Semi-Automatic Mask Aligner
Model 800E
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The OAI Model 800E front and backside, semi-automatic mask aligner system offers advanced features and specifications found most often in costly automated production mask aligners. With the development of this mask aligner, OAI meets the growing challenge of the dynamic semiconductor and MEMS market with a new class of mask aligners that are engineered for R&D and low volume production.
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Product
Mixed Signal Oscilloscope, 500 MHz 2 Analog Plus 16 Digital Channels
MSOX3052A
Oscilloscope
500 MHz2 analog plus 16 digital channels Easily view your signals on the 8.5-inch WVGA display Capture more data with up to 4 Mpts memory See more signal detail with 1,000,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add bandwidth, memory, 20 MHz arbitrary waveform generator, 3-digit voltmeter, serial trigger and analysis, segmented memory & mask testing at any time
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Product
Oscilloscope - 200 MHz, 2 Analog Channels
DSOX3022T
Oscilloscope
200 MHz2 analog channels Easily view and analyze your signals with on the large 8.5-inch capacitive touch screen Isolate signals in seconds with exclusive Zone touch triggering See more signal detail with the 1,000,000 wfms/s update rate Capture more data with up to 4 Mpts memory Expand your measurement capabilities with full upgradability: Add bandwidth, digital channels, 20 MHz arbitrary waveform generator, 3-digit voltmeter, serial trigger and analysis & mask testing at any time
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Product
Large Substrate Mask Aligner
Model 6020
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The Model 6020 is a large substrate Production Mask Aligner or Auto-flood Exposure System for RDL First Level Advanced Packaging (PLP) and markets requiring exposure of large glass panels. It is engineered with OAI’s precision, reliability, and quality that is found in all of OAI’s products. The features include wedge effect leveling, superb process repeatability, ≤ 2.0µm printing resolution, and remote diagnostics. Using robotic handling, the system can stand alone or be fully integrated with photo resist processing.
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Product
Portable Converged Networks Test Set
TX Series
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The VeEX TX product series offers a complete test solution for Next Generation of Transport, Metro and Carrier Ethernet Testing. Color graphical display assisted with touch panel enables users tapping through the test configuration and accessing complex overhead bits and bytes. Features include APS, TDM, pointer adjustment, pulse mask analysis, G.821/G.826/M.2100, histogram, and overhead access.
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Product
Bounded Output Mask
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The bounded output mask provides a means of ensuring that measurements of TI according to IEC 62359 can satisfy the requirement of only determining the ultrasonic output through an area of 1 cm x 1 cm.
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Product
Preamplifiers
LNA Series
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Low noise amplifier with 12.5 dB of gain covering the nominal frequency range 1 MHz to 3 GHz and can be used in the range from 200 kHz to 4 GHz. With its high gain and low noise figure, it will significantly increase the sensitivity of virtually all spectrum analyzers and other RF measuring instruments. All measuring instruments have a 'noise figure', which is a measure of how good the instrument is at measuring low level signals, the lower this figure, the better, although the lowest signal level will still be governed by the measurement bandwidth. A typical spectrum analyzer may have a noise figure of 20 dB or more, whereas a typical receiver may have a noise figure of 10 dB. The preamplifier has a noise figure of typically 4 dB, significantly enhancing the low level performance of such instruments, enabling signals that were previously masked by noise to be seen.
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Product
Exposure Systems
Model 2012AF & 2012SM
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The Model 2012AF Flood Exposure System provides a cost-effective method for automated flood exposure. Designed to accommodate wafers from 8” to 300mm, the tool features automated FOUP loading. Mask and substrate changeover can be accomplished quickly and easily adding to both versatility and high-volume throughput of this production tool.The Model 2012SM Automated Edge-bead Exposure System provides a cost-effective method for edge-bead removal using standard shadow mask technology. Designed to accommodate wafers from 8” to 300mm, the tool features automated FOUP loading. Mask and substrate changeover can be accomplished quickly and easily adding to both versatility and high-volume throughput of this production tool.
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Product
Mixed Signal Oscilloscope: 100 MHz, 4 Analog Plus 8 Digital Channels
MSOX2014A
Oscilloscope
100 MHz4 analog plus 8 digital channels Easily view your signals on the 8.5-inch WVGA display Capture more data with up to 1 Mpts memory See more signal detail with 50,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add 20 MHz function generator, 3-digit voltmeter, serial trigger and analysis, segmented memory & mask testing at any time Easily set up teaching labs with our free Educator's Resource Kit
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Product
5000B-series Attitude Gyroscopes With Warning Flag
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This gyro is a variation of our popular 5000B air-driven attitude gyro. It includes a warning flag that drops into view upon the loss of vacuum. This can be a life saving feature during an emergency in a busy cockpit. The horizon mask moves to indicate climb, dive, and bank attitudes, which are portrayed against a fixed airplane. The fluid movements and intuitive presentation provide the pilot with a realistic sense of the aircraft’s attitude in relation to the natural horizon.
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Product
Medical Masks Flammability Tester
TF361
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TESTEX Testing Equipment Systems Ltd.
Medical Masks Flammability Tester is used to test the flammability of medical masks, to ensure the safety of masks to wear in. Medical Masks Flammability test Chamber complies with EN 149, GB 2626, GB 19083.
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Product
High-Mount Outdoor Infrared Motion Sensor
ENVIROMUX-IMD-OHM
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High-mount outdoor weatherproof sensor with 94 detection zones. Unique pyro-element provides multiple pattern detection and accurate discrimination function for spot temperature changes of moving objects. Drastically reduces false and missed alarms caused by severe outdoor environmental changes. Upper and lower area must be activated to generate an alarm condition. Summer night compensation, advanced temperature compensation, and vegetation sway analysis logic. Ideal detection area setting – adjustable length/spot detection. Registers movement in area covered: 13/18/30/40 ft and 85° wide. LED indicators for operation and system status. Unwanted detection areas can be eliminated using the included area masking seal. Mounting height: 8.3 to 10 feet. Tamper switch opens when cover is removed. Screw terminal. To connect to the RJ45 inputs use CAT5/5e/6 cable terminated at one end with RJ45 connector. Connect the un-terminated end to the sensor screw terminal. Operating temperature: -4 to 140°F (-20 to 60°C). IP54 compliant. Powered by ENVIROMUX-2D/5D/16D.
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Product
Reticle Manufacturing
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An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.
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Product
350 MHz, 2 Analog Plus 16 Digital Channels Oscilloscope
MSOX3032A
Oscilloscope
350 MHz2 analog plus 16 digital channels Easily view your signals on the 8.5-inch WVGA display Capture more data with up to 4 Mpts memory See more signal detail with 1,000,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add bandwidth, memory, 20 MHz arbitrary waveform generator, 3-digit voltmeter, serial trigger and analysis, segmented memory & mask testing at any time
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Product
MASK MVM-SEM® E3600 Series
E3650
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Amid the progress of multiple-exposure technology, and the development of finer-pitch and more complicated circuits, as well as increases in the number of masks and the number of measurement points on each mask, the size of wiring patterns formed on photomasks needs to be measured and evaluated stably with high precision. Advantest’s E3600 series meets the needs of state-of-the-art devices with high measurement repeatability and stable throughput.
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Product
Oscilloscope - 500 MHz, 2 Analog Channels
DSOX3052T
Oscilloscope
500 MHz2 analog channels Easily view and analyze your signals with on the large 8.5-inch capacitive touch screen Isolate signals in seconds with exclusive Zone touch triggering See more signal detail with the 1,000,000 wfms/s update rate Capture more data with up to 4 Mpts memory Expand your measurement capabilities with full upgradability: Add bandwidth, digital channels, 20 MHz arbitrary waveform generator, 3-digit voltmeter, serial trigger and analysis & mask testing at any time
