Gas Flow
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Product
Gas Flow Standards
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Fluke Calibration offers molbloc/molbox gas flow calibration systems to calibrate flow meters and controllers over a very wide range of flows. The systems are fast, precise and transportable and can be fully automated using COMPASS for Flow software. molblocs, which are the heart of the measurement system, are mechanically stable, gravimetrically calibrated laminar flow and sonic nozzle elements.
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Product
Ultrasonic Gas Flow Sensor
GB Series
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Panasonic Industrial Devices Sales Company of America
A compact, dual-function Ultrasonic Gas Flow Sensor that measures gas flow and gas concentration for flow rates from 1 to 25 Liters per minute. This Ultrasonic Gas Flow Sensor uses a unique time-of-flight design with an onboard processor to make highly accurate measurements of both gas flow and concentration. Suitable for use with many gases in an easy to implement format.
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Air Quality / Gas / Flow Sensors
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Panasonic Industrial Devices Sales Company of America
Panasonic offers compact, high sensitivity Air Quality, Gas and Flow Sensors for use in equipment or automation processes. Designed for air quality / IAQ monitors and home appliances, the Laser Type PM (Particulate Matter) Sensor can detect dust particles down to the 0.3 m size.
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Gas Flow Meters
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There are innumerable circumstances where gas flow rates need to be quickly and precisely measured. You’ll always be prepared with Netech’s versatile range of gas flow meters, which are designed to measure several types of gases including air, N2, O2, CO2, and He.
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Gas Flow Meters & Controllers
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Accurate Mass Flow Measurement Sierra designs and manufactures a wide range of today's most advanced analog and digital gas flow meters, mass flow meters, controllers and switches across three core technologies: Capillary Thermal, Immersible Thermal, and Mass Vortex. Each gas flowmeter or controller meets exacting standards, and we can also customize your flow rate sensor to meet application requirements (often free of charge).
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Mass Flow Controllers
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Alicat Scientific, Incorporated
Use mass flow controllers to measure and control gas flow from 0.5 SCCM to 10,000 SLPM, with accuracies as good as ±0.5% of reading or ±0.05% of full scale and a control ranges as good as 0.01-100% (10,000:1 turndown).
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Product
Variable Constant Differential Flow Controller
VCD 1000
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The Porter Model VCD 1000 flow controller is precision-engineered to control low gas flows at constant mass flow rates regardless of changes in downstream pressure.
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Product
CEMS
FMD 09
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IMR Environmental Equipment, Inc.
The continuous measurement of velocity and temperature of gas flows is much important at operation of a system with flowing gases (e.g. hall outlet air, exhaust etc.).
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Product
Hot Dipping Simulator
HDPS
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This is a hot-dip galvanizing simulator that simulates various hot-dip galvanizing processes such as heating, cooling, vacuuming, gas replacement, and spraying of steel sheets on a laboratory scale. It is possible to simulate the parameters close to the actual line, such as zinc bath temperature, immersion speed, immersion time, and gas flow rate adjustment for weight control. Also, 20 to 25 sheets can be tested
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Product
Process Particle Size Analyzers
Parsum Range
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Parsum Probes use Spatial Filter Velocimetry to deliver in situ, real-time size and velocity measurements for solid particles suspended in a pneumatic or gravity flow gas stream. Robust, dustproof and waterproof they measure particles in the size range 50-6000 µm with velocities from 0.01-50 m/s and are suitable for any industrial environment.
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Product
Ultra-thin Mass Flow Controller
DZ-100
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The DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the D500. This innovative technology controls the mass flow of various gases with high precision. As with the D500, the user-configurable DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.
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Product
DELTA™ IV 4-zone Flow Ratio Controller
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DELTA™ IV 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. It is available in EtherCAT® or DeviceNet™ providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution.
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Product
On-board Emissions Measurement System
OBS-ONE PM unit
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OBS-ONE PM unit is the industry-leading on-board Particulate Matter (PM) measurement system. It collects PM on a filter paper, using a partial flow gravimetric sampling method, while simultaneously measuring real-time PM. A key feature of this design is the use of a venturi flow meter which enables reliable proportional sampling and accurate exhaust gas flow measurement under transient flow conditions. Combine the GAS unit and PM unit to perform certification tests on heavy duty and non-road vehicles.
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Product
Low Pressure Drop Thermal Mass Flow Meter
HFM-200 LFE
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The HFM-200 LFE Series by Teledyne Hastings can be configured and accurately measure gas flow in a broad array of applications. Featuring reliability and stability, the 200 Series is chosen by users for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow meter compatible with most gases.The HFM-200 LFE meter has flow ranges from 0-10 sccm to flows of 0-15,000 slm; provides analog outputs, and is constructed of stainless steel. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Cleaning for oxygen service is available. Our laminar flow elements (smooth, threaded or flanged) are available in various sizes from 3/8" up to 8". Low pressure drops at full scale flow.
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Digital "A" Flow Controller for High Flow
HFM-D-306A / HFC-D-308A
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Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.HFM-D-306A/HFC-D-308A mass flow instruments have flow ranges from 0-2500 slm to 0-10000 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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DELTA™ III 3-zone Flow Ratio Controller
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The DELTA™ III Flow Ratio Controller divides and controls mixed process gas flows to three chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. Available with EtherCAT® or DeviceNet™ communications, this device provides the latest in gas flow ratio measurement and control technology.
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Constant Temperature Anemometry (CTA) - Hot-Wire Anemometry - Thermal Anemometry
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Constant Temperature Anemometry (CTA), also known as Thermal Anemometry, is a technique for the measurement of turbulence in 1, 2 or 3-dimensional gas and liquid flows, using hot-wire or hot-film probes inserted in the flow. CTA is particularly suitable for the measurement of flows with very fast fluctuations at a point (high turbulence) and the study of flow micro structures, where there is a need to resolve small flow eddies down to the order of tenths of a mm.
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Product
Extractive Gas Analyzers
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Reliable gas analysis — even under harsh process conditionsSICK's extractive gas analyzers can be used in a large number of applications. The extractive measurement technology extracts a partial gas flow from the gas duct, conditions the extracted gas and feeds it to an analyzer module under constant conditions. All the measurement technology that SICK offers – from gas sampling and conditioning right through to the numerous analyzer modules – is perfectly tailored to the measurement task concerned.
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Gas Analysis
QIC MultiStream
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The Hiden QIC MultiStream is a complete, multi-stream gas composition monitoring system. Capable of analysing gas streams at flow rates from 4 ml/min up to 10 L/min. The system is suited to a range of applications where multi-component, multi-stream gas analysis is required, environmental monitoring for example.
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Automatic Thermogravimetric Analyzer
LD-LTGA-A10
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Automatic Thermogravimetric AnalyzerLD-LTGA-A10is a high performance, efficient unit designed to study thermal stability of materials and its allied components. It offers a resolution of 0.1 ºC and works between temperature range of room temperature to 1000 ºC. Operates in an inert, oxidizing, reducible, static and dynamic atmosphere and possess two-way gas and control flow volume.
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High Speed & Precision Pressure Insensitive Mass Flow Module
D700MG
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Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.
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Digital "A" Flow Controller for Medium Flow
HFM-D-305A / HFC-D-307A
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Fast Response, Tight Accuracy!Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.HFM-D-305A/HFC-D-307A mass flow instruments have flow ranges from 0-1000 slm to 0-2500 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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Product
Mass Flow Meters
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Alicat Scientific, Incorporated
Use mass flow meters to measure gas flow from 0.5 SCCM to 10,000 SLPM, with accuracies as good as ±0.5% of reading or ±0.05% of full scale and a measurement range of 0.01-100% (10,000:1 turndown).
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Product
Super high temperature hall effect measurement system
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Super high temperature hall effect measurement system that is useful to flow gas into chamber with sample. - Newly developed furnace that makes it possible to increase over 800 and use for measuring hall effect. - Gas flow control system in order to flow various gas. - Sample holder for high temperature. (keep the good contact on 800) - High Temperature control system (DC power) On condition of specific temperature with gas flow , new semiconductor materials have been developed to see electrical property's change.
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Product
Paragon® 8.0 Slm NF3 Flow Intelligent Remote Plasma Source
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For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 98%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
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Product
IRYSYS
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This is a powerful, compact soft X-ray irradiation static elimination device that uses light to directly ionize gas molecules and eliminate static electricity. The light irradiation static elimination method does not generate any dust and generates almost no electromagnetic noise. In addition, stable static elimination performance can be achieved regardless of the gas flow state. Static elimination is also possible in inert gases such as N2 and Ar.
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Product
CEMS
FMD 02
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IMR Environmental Equipment, Inc.
The continuous measurement of velocity and temperature of gas flows is much important at operation of a system with flowing gases (e.g. hall outlet air, exhaust etc.).
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Product
Digital Mass Flow Controller and Meter
300 Vue Series Digital Flow Meter
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The 300 Vue is our newest series of digital gas thermal mass flow instruments which provide accurate, fast and convenient gas measurement and control. The color touchscreen display allows for local adjustments and monitoring of gas flow. Powerful and intuitive menus enable control of the gas flow in many ways. The instrument can be installed and operating in seconds. Flexible custom flow instruments without the custom price or lead time.
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Product
Gas Meter Synthetical Test Bench
SY8506
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Hong Kong Songyang Industrial Ltd.
The test of the error of the rate of flow:Using the gas flow standard device (in the shape of the bell prover) as our standard equipment, we can figure the standard volume of the tested gas by using the high-precision revolving encoder to measure the descending displacement of the bell prover.
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Product
Smaet LDV III
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A Laser Doppler Velocimeter (LDV) measures fluid velocity by utilizing coherence of laser light. It detects the Doppler shift frequency of the scattering light of particles in the fluid and calculates the velocity of the particles (fluid). With a LDV system, non-intrusive measurements without disturbing the measuring object, liquid or gas flow, are achieved. No calibration is necessary and reverse flow measurements at a high resolution is also possible. The LDV system provides the absolute value of the flow velocity with accuracy.
